Analysis and Design Principles of MEMS Devices
Publisher: Elsevier Science | ISBN: 0444516166 | edition 2005 | File type: PDF | 328 pages | 23,3 mb
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices.
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